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ARTICLES IN THE BOOK

  1. Atomic force microscope
  2. Atomic nanoscope
  3. Atom probe
  4. Ballistic conduction
  5. Bingel reaction
  6. Biomimetic
  7. Bio-nano generator
  8. Bionanotechnology
  9. Break junction
  10. Brownian motor
  11. Bulk micromachining
  12. Cantilever
  13. Carbon nanotube
  14. Carbyne
  15. CeNTech
  16. Chemical Compound Microarray
  17. Cluster
  18. Colloid
  19. Comb drive
  20. Computronium
  21. Coulomb blockade
  22. Diamondoids
  23. Dielectrophoresis
  24. Dip Pen Nanolithography
  25. DNA machine
  26. Ecophagy
  27. Electrochemical scanning tunneling microscope
  28. Electron beam lithography
  29. Electrospinning
  30. Engines of Creation
  31. Exponential assembly
  32. Femtotechnology
  33. Fermi point
  34. Fluctuation dissipation theorem
  35. Fluorescence interference contrast microscopy
  36. Fullerene
  37. Fungimol
  38. Gas cluster ion beam
  39. Grey goo
  40. Hacking Matter
  41. History of nanotechnology
  42. Hydrogen microsensor
  43. Inorganic nanotube
  44. Ion-beam sculpting
  45. Kelvin probe force microscope
  46. Lab-on-a-chip
  47. Langmuir-Blodgett film
  48. LifeChips
  49. List of nanoengineering topics
  50. List of nanotechnology applications
  51. List of nanotechnology topics
  52. Lotus effect
  53. Magnetic force microscope
  54. Magnetic resonance force microscopy
  55. Mechanochemistry
  56. Mechanosynthesis
  57. MEMS thermal actuator
  58. Mesotechnology
  59. Micro Contact Printing
  60. Microelectromechanical systems
  61. Microfluidics
  62. Micromachinery
  63. Molecular assembler
  64. Molecular engineering
  65. Molecular logic gate
  66. Molecular manufacturing
  67. Molecular motors
  68. Molecular recognition
  69. Molecule
  70. Nano-abacus
  71. Nanoart
  72. Nanobiotechnology
  73. Nanocar
  74. Nanochemistry
  75. Nanocomputer
  76. Nanocrystal
  77. Nanocrystalline silicon
  78. Nanocrystal solar cell
  79. Nanoelectrochemistry
  80. Nanoelectrode
  81. Nanoelectromechanical systems
  82. Nanoelectronics
  83. Nano-emissive display
  84. Nanoengineering
  85. Nanoethics
  86. Nanofactory
  87. Nanoimprint lithography
  88. Nanoionics
  89. Nanolithography
  90. Nanomanufacturing
  91. Nanomaterial based catalyst
  92. Nanomedicine
  93. Nanomorph
  94. Nanomotor
  95. Nano-optics
  96. Nanoparticle
  97. Nanoparticle tracking analysis
  98. Nanophotonics
  99. Nanopore
  100. Nanoprobe
  101. Nanoring
  102. Nanorobot
  103. Nanorod
  104. Nanoscale
  105. Nano-Science Center
  106. Nanosensor
  107. Nanoshell
  108. Nanosight
  109. Nanosocialism
  110. Nanostructure
  111. Nanotechnology
  112. Nanotechnology education
  113. Nanotechnology in fiction
  114. Nanotoxicity
  115. Nanotube
  116. Nanovid microscopy
  117. Nanowire
  118. National Nanotechnology Initiative
  119. Neowater
  120. Niemeyer-Dolan technique
  121. Ormosil
  122. Photolithography
  123. Picotechnology
  124. Programmable matter
  125. Quantum dot
  126. Quantum heterostructure
  127. Quantum point contact
  128. Quantum solvent
  129. Quantum well
  130. Quantum wire
  131. Richard Feynman
  132. Royal Society's nanotech report
  133. Scanning gate microscopy
  134. Scanning probe lithography
  135. Scanning probe microscopy
  136. Scanning tunneling microscope
  137. Scanning voltage microscopy
  138. Self-assembled monolayer
  139. Self-assembly
  140. Self reconfigurable
  141. Self-Reconfiguring Modular Robotics
  142. Self-replication
  143. Smart dust
  144. Smart material
  145. Soft lithography
  146. Spent nuclear fuel
  147. Spin polarized scanning tunneling microscopy
  148. Stone Wales defect
  149. Supramolecular assembly
  150. Supramolecular chemistry
  151. Supramolecular electronics
  152. Surface micromachining
  153. Surface plasmon resonance
  154. Synthetic molecular motors
  155. Synthetic setae
  156. Tapping AFM
  157. There's Plenty of Room at the Bottom
  158. Transfersome
  159. Utility fog

 



NANOTECHNOLOGY
This article is from:
http://en.wikipedia.org/wiki/Micromachinery

All text is available under the terms of the GNU Free Documentation License: http://en.wikipedia.org/wiki/Wikipedia:Text_of_the_GNU_Free_Documentation_License 

Micromachinery

From Wikipedia, the free encyclopedia

 


Micromachines are mechanical objects that are fabricated in the same general manner as integrated circuits. They are generally considered to be between 100 nanometres to 100 micrometres in size, though that is debatable. The applications of micromachines include accelerometers that detect when a car has hit an object and trigger an airbag. Complex systems of gears and levers are another application.

The fabrication of these devices is usually done by one or both of two techniques: surface micromachining and bulk micromachining.

Most micromachines act as transducers; in other words, they are either sensors or actuators.

Sensors convert information from the environment into interpretable electrical signals. One example of a micromachine sensor is a resonant chemical sensor. A lightly damped mechanical object vibrates much more at one frequency than any other, and this frequency is called its resonant frequency. A chemical sensor is coated with a special polymer that attracts certain molecules, such as anthrax, and when those molecules attach to the sensor, its mass increases. The increased mass alters the resonant frequency of the mechanical object, which is detected with circuitry.

Actuators convert electrical signals and energy into motion of some kind. The three most common types of actuators are electrostatic, thermal, and magnetic. Electrostatic actuators use the force of electrostatic energy to move objects. Two mechanical elements, one that is stationary (the stator) and one that is movable (the rotor) have two different voltages applied to them, which creates an electric field. The field competes with a restoring force on the rotor (usually a spring force produced by the bending or stretching of the rotor) to move the rotor. The greater the electric field, the farther the rotor will move. Thermal actuators use the force of thermal expansion to move objects. When a material is heated, it expands and amount depending on material properties. Two objects can be connected in such a way that one object is heated more than the other and expands more, and this imbalance creates motion. The direction of motion depends on the connection between the objects. This is seen in a "heatuator", which is a U-shaped beam with one wide arm and one narrow arm. When a current is passed through the object, heat is created. The narrow arm is heated more than the wide arm due to the fact that they have the same current density. Since the two arms are connected at the top, the stretching hot arm pushes in the direction of the cold arm. Magnetic actuators used fabricated magnetic layers to create forces.

See also

  • MEMS

To do bulk micromachining, the region needed is highly doped with boron and the unwanted silicon is etched in liquid silicon etches. This technique is termed an etchstop as the doping of boron produces an unetchable layer/pattern. See footnote for further information. Footnotes: http://www.techneglas.com/dopantpages/etch.htm

External links

  • Image Gallery of Working Micromachines
Retrieved from "http://en.wikipedia.org/wiki/Micromachinery"